The science and engineering of microelectronic fabrication / Stephen A. Campbell
Material type:
TextSeries: Oxford series in electrical engineeringCopyright date: 2001Publisher: New York : Oxford University Press, 2001Edition: 2nd. edDescription: xiv, 603 p. : ill., 23 cmContent type: - text
- unmediated
- volume
- 9780198084808
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
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Library of SEAMEO RECSAM Open Shelf | 621.38152 CAM (Browse shelf(Opens below)) | Available | 36218 |
Includes bibliographical references and index
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